1.

Conference Proceedings
Conference Proceedings
1. LASER PHYSICAL AND LASER CHEMICAL VAPOR DEPOSITION OF TiN AND TiNxOx FILMS
Narayan, J. ; Biunno, N. ; Srivatsa, A.R. ; Singh, R. ; Chen, B.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.435-440,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. PERFORMANCE AND RELIABILITY OF THIN GATE DIELECTRICS FOR VLSI: MATERIALS AND PROCESSING PERSPECTIVE
Singh, R.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.519-524,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
3.

Conference Proceedings
Conference Proceedings
3. IN-SITU RAPID ISOTHERMAL PROCESSING OF THIN EPITAXIAL DIELECTRIC FILMS ON SILICON AND COMPOUND SEMICONDUCTORS
Singh, R. ; Radpour, F. ; Narayan, J. ; Joshi, S.P. ; Rahmati, M. ; Anandakugan, S. ; Kahng, S.K.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.681-690,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
4.

Conference Proceedings
Conference Proceedings
4. USE OF HIGH-TEMPERATURE SUPERCONDUCTORS IN HIGH SPEED ELECTRONIC SWITCHES WITH CURRENT GAIN
Biegel, Bryan A. ; Singh, R.
Pub. info.: High-temperature superconductors : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A..  pp.873-876,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 99
5.

Conference Proceedings
Conference Proceedings
5. DEVELOPMENT TRENDS IN THE DIRECTION OF RAPID ISOTHERMAL PROCESSING (RIP) DOMINATED SILICON INTEGRATED CIRCUIT FABRICATION
Singh, R. ; Nulman, J.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.441-448,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71
6.

Conference Proceedings
Conference Proceedings
6. Chemical and ion beam etch studies of polycrystalline silicon
Lester, P.A. ; Singh, R. ; Rice, D.A. ; Pangborn, R.N. ; Ashok, S. ; Fonash, S.J.
Pub. info.: Grain boundaries in semiconductors : proceedings of the Materials Research Society annual meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.199-204,  1982.  New York.  North-Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 5
7.

Conference Proceedings
Conference Proceedings
7. The effect of beam species and anneal history on silicon surface damage induced by ion beam etching
Davis, R. J. ; Singh, R. ; Fonash, S. J. ; Caplan, P. J. ; Poindexter, E. H.
Pub. info.: Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A..  pp.607-612,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 25