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Image measurement of micro-hole with linear CCD [6150-138]

Author(s):
  • Wu, W. ( Hubei Univ. of Technology (China) )
  • Shen, B. ( Hubei Univ. of Technology (China) )
  • Shen, G ( Huazhong Univ. of Science and Technology (China) )
  • Wang, S ( Hubei Univ. of Technology (Chino) )
  • Xie, F ( Hubei Univ. of Technology (Chino) )
Publication title:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6150
Pub. Year:
2006
Pt.:
2
Page(from):
615057
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819461896 [081946189X]
Language:
English
Call no.:
P63600/6150
Type:
Conference Proceedings

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