Ploessl, A. ; Scholz, R. ; Schulze, H.-J. ; Hopfe, S.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.224-231, 1999. Pennington, N.J.. Electrochemical Society
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.109-120, 1995. Pennington, NJ. Electrochemical Society