Rubin, M. E. ; Saha, S. ; Lutze, J. ; Nouri, F. ; Scott, G. ; Pramanik, D.
Pub. info.:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.213-, 1999. Warrendale, PA. MRS - Materials Research Society
Saha, S. ; Srinivasan, G. ; Rezvani, G. A. ; Farr, M.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.275-, 1999. Warrendale, PA. MRS - Materials Research Society