Rapid fabrication of microcomponents
- Author(s):
Hanemann,T. ( Forschungszentrum Karlsruhe GmbH ) HauBelt,J.H. Ruprecht,R. Skrifvars,M. Gahr,K.-H.Zum Pfleging,W. - Publication title:
- Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4019
- Pub. Year:
- 2000
- Page(from):
- 436
- Page(to):
- 443
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436450 [0819436453]
- Language:
- English
- Call no.:
- P63600/4019
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Innovative molding technologies for the fabrication of components for microsystems
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
8
Conference Proceedings
Laser micromachining of polymeric mold inserts for rapid prototyping of PMMA devices via photomolding
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermoplastics
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Direct laser-assisted processing of polymers for microfluidic and micro-optical applications
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
10
Conference Proceedings
Laser micromachining of mold inserts for replication techniques: state of the art and applications
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
A Comparison of Microactuator Concepts in View of Fabrication Technologies and Applications
Electrochemical Society |
American Chemical Society |
12
Conference Proceedings
Laser-assisted modification of polymers for microfluidic, micro-optics, and cell culture applications
SPIE - The International Society of Optical Engineering |