1.

Conference Proceedings
Conference Proceedings
1. RAPID THERMAL PROCESSING OF MULTIPLE LOW DOSE OXYGEN IMPLANTATIONS FOR SIMOX
Blake, J. ; Gelpey, J. C. ; Lee, D. M. ; Rowland, L. ; Rozgonyi, G. A.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.61-66,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. DYNAMIC ANNEALING PHENOMENA AND THE ORIGIN OF RTA-INDUCED “HAIRPIN" DISLOCATIONS
Maszara, W. ; Sadana, D. K. ; Rozgonyi, G. A. ; Sands, T. ; Washburn, J. ; Wortman, J. J.
Pub. info.: Energy beam-solid interactions and transient thermal processing/1984 : symposium held November 26-30, 1984, Boston, Massachusetts, U.S.A..  pp.277-286,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 35
3.

Conference Proceedings
Conference Proceedings
3. EXTRINSIC GETTERING WITH EPITAXIAL MISFIT DISLOCATIONS
Salih, A. S. M. ; Maszara, W. ; Kim, H. J. ; Rozgonyi, G. A.
Pub. info.: Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A..  pp.61-70,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 36
4.

Conference Proceedings
Conference Proceedings
4. ELECTRICAL CHARACTERIZATION OF SILICON WITH BURIED DEFECTS
Honeycutt, J. ; Radzimski, Z. ; Kola, R. R. ; Salih, A. S. M. ; Rozgonyi, G. A.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.121-124,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
5.

Conference Proceedings
Conference Proceedings
5. INFLUENCE OF RAPID THERMAL ANNEALING OF SHALLOW BF2 IMPLATATION INTO PRE-AMORPHIZED SILICON
Maszara, W. ; Carter, C. ; Sadana, D. K. ; Liu, J. ; Ozguz, V. ; Wortman, J. ; Rozgonyi, G. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.285-292,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
6.

Conference Proceedings
Conference Proceedings
6. GERMANIUM IMPLANTATION INTO SILICON: AN ALTERNATE PRE-AMORPHIZATION/RAPID THERMAL ANNEALING PROCEDURE FOR SHALLOW JUNCTION TECHNOLOGY
Sadana, D. K. ; Myers, E. ; Liu, J. ; Finstaad, T. ; Rozgonyi, G. A.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.303-308,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23
7.

Conference Proceedings
Conference Proceedings
7. X-RAY TOPOGRAPHY AND EBIC STUDIES OF MISFIT DISLOCATIONS IN STRAINED LAYER STRUCTURES
Hamaguchi, N. ; Humphreys, T. P. ; Parker, C. A. ; Bedair, S. M. ; Jiang, B-L. ; Radzimski, Z. J. ; Rozgonyi, G. A.
Pub. info.: Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A..  pp.541-546,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 102
8.

Conference Proceedings
Conference Proceedings
8. DEFECT AND DOPANT CONTROL DURING SILICON EPITAXY USING B AND Ge
Kola, R. R. ; Posthill, J. B. ; Salih, A. S. M. ; Rozgonyi, G. A. ; Bean, K. E. ; Lindberg, K.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.641-644,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
9.

Conference Proceedings
Conference Proceedings
9. OXYGEN PRECIPITATION EFFECTS IN DEGENERATELY-DOPED SILICON
Rozgonyi, G. A. ; Pearce, C.W. ; Jacoodine, R. J.
Pub. info.: Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.181-186,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 14
10.

Conference Proceedings
Conference Proceedings
10. LINEAR ZONE-MELT RECRYSTALLIZED Si FILMS USING INCOHERENT LIGHT
Xamgar, A. ; Rozgonyi, G. A. ; Knoell, R.
Pub. info.: Laser-solid interactions and transient thermal processing of materials : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.569-574,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 13