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Pushing releability limits in SiO2: an extension to gate oxide scaling

Author(s):
Publication title:
Photonics 2000 : International Conference on Fiber Optics and Photonics : 18-20 December 2000, Calcutta, India : proceedings
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4417
Pub. Year:
2000
Page(from):
161
Page(to):
171
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819441249 [0819441244]
Language:
English
Call no.:
P63600/4417
Type:
Conference Proceedings

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