Ronse, K. ; Vandenberghe, G. ; Hendrickx, E. ; Leunissen, L. H. A. ; Aksenov, Y.
Pub. info.:
EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany. pp.6-12, 2005. Bellingham, Wash.,. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering