1.

Conference Proceedings
Conference Proceedings
1. LOW-TEMPERATURE ATMOSPHERIC AMBIENT RAPID LAMP CLEANING OF SILICON SURFACES
Roman, P. ; Tsai, C.-L. ; Hengstebeck, R. ; Pantano, C. ; Berry, J. ; Kamieniecki, E. ; Ruzyllo, J.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.145-149,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. THICKNESS DEPENDENT SENSITIVITY OF GATE OXIDES TO SURFACE CONTAMINATION
Ridley, R. ; Wu, C.-T. ; Roman, P. ; Dolny, G. ; Grebs, T. ; Stensney, F. ; Ruzyllo, J.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.158-164,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36