1.
|
Conference Proceedings
|
Ivin,V.V. ; Larin,D.Yu. ; Lucas,K.D. ; Makhviladze,T.M. ; Rogov,A.A. ; Verzunov,S.V.
Pub. info.: |
Optical Microlithography X. pp.567-577, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3051 |
|
2.
|
Conference Proceedings
|
Lucas,K.D. ; Ivin,V.V. ; Kudrja,V.P. ; Larin,D.Yu. ; Makhviladze,T.M. ; Medvedeva,M.G. ; Rogov,A.A. ; Verzunov,S.V. ; Yang,D.C.
Pub. info.: |
Optical Microlithography IX. Part1 pp.348-359, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
2726 |
|