1.

Conference Proceedings

Conference Proceedings
Pavanello, M.A. ; Martino, J.A. ; Mercha, A. ; Rafi, J.M. ; Simoen, E. ; Claeys, C. ; van Meer, H. ; De Meyer, K.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.205-212,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
2.

Conference Proceedings

Conference Proceedings
Job, R. ; Ulyashin, A.G. ; Ma, Y. ; Fahnwr, W.R. ; Simoen, E. ; Rafi, J.M. ; Claeys, C. ; Niedernostheide, F.J. ; Schulze, H.J.
Pub. info.: High purity silicon VII : proceedings of the international symposium.  pp.141-154,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-20