1.

Conference Proceedings

Conference Proceedings
Popov, V.P. ; Tyschenko, I.E. ; Kachurin, G.A. ; Janovskaja, S.G. ; Obodnikov, V.I.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.309-317,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22
2.

Conference Proceedings

Conference Proceedings
Antonova, I.V. ; Misiuk, A. ; Popov, V.P. ; Plotnikov, A.E. ; Surma, B.
Pub. info.: Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II.  pp.98-106,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-22