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Mobility Characterization of p-Type and n-Type Strained Si1-x-yGexCy/Si Epilayer Hall Devices

Author(s):
Peterson, J. J.
Hunt, C. E.
Zappe, S. F.
Obermeier, E.
Westhoff, R.
Robinson, M.
1 more
Publication title:
III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
535
Pub. Year:
1999
Page(from):
293
Pub. info.:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994416 [1558994416]
Language:
English
Call no.:
M23500/535
Type:
Conference Proceedings

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