1.

Conference Proceedings
Conference Proceedings
1. High Rate Dry Etching of GaN, AIN and InN in ECR Cl2/CH4/H2/Ar Plasmas
Vartuli, C. B. ; Pearton, S. J. ; Abernathy, C. R. ; Shul, R. J. ; Kilcoyne, S. P. ; Crawford, M. Hagerott ; Howard, A. J. ; Parmeter, J. E.
Pub. info.: Materials - fabrication and patterning at the nanoscale : Symposium held April 19-20, 1995, San Francisco, California, USA.  pp.37-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 380
2.

Conference Proceedings
Conference Proceedings
2. Hydrogen Diffusion and Passivation in InGaAlN Alloys
Pearton, S. J. ; Abernathy, C. R. ; MacKenzie, J. D. ; Vartuli, C. B. ; Wilson, R. G. ; Zavada, J. M. ; Shul, R. J.
Pub. info.: Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.497-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 378