1.

Conference Proceedings
Conference Proceedings
1. Reliability of implant-isolation regions in highly-doped GaAs-based structures
Ren, F. ; Pearton, S. J. ; Lothian, J. R. ; Fullowan, T. R. ; Abernathy, C. R. ; Chu, S. N. G.
Pub. info.: III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.337-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 300
2.

Conference Proceedings
Conference Proceedings
2. Low temperature SiNx as a sacrificial layer in novel device fabrication
Lothian, J. R. ; Ren, F. ; Pearton, S. J. ; Abernathy, C. R. ; Tseng, B. ; Hobson, W. S.
Pub. info.: III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.161-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 300
3.

Conference Proceedings
Conference Proceedings
3. Deposition of TiN by electron cyclotron resonance-metal organic molecular beam epitaxy
Wisk, P. W. ; Abernathy, C. R. ; Pearton, S. J. ; Ren, F. ; Katz, A. ; Bohling, D. A.
Pub. info.: III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.447-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 300