1.

Conference Proceedings
Conference Proceedings
1. ICP Etching of SiC
Wang, J. J. ; Lambers, E. S. ; Pearton, S. J. ; Ostling, M. ; Zetterling, C-M. ; Grow, J. M. ; Ren, F.
Pub. info.: Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A..  pp.177-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 483
2.

Conference Proceedings
Conference Proceedings
2. Plasma Chemistries for Etching of La0.41Ca0.59MnO3 and SmCo CMR Structures
Wang, J. J. ; Jung, K. B. ; Childress, J. R. ; Pearton, S. J. ; Sharifi, F. ; Dahmen, K. H. ; Gillman, E. S. ; Cadieu, F. J. ; Rani, R. ; Qian, X. R. ; Chen, Li
Pub. info.: High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S..  pp.141-,  1998.  Warrendale, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 517
3.

Conference Proceedings
Conference Proceedings
3. Low Bias Dry Etching of SiC and SiCN in ICP NF3 Discharges
Wang, J. J. ; Cho, Hyun ; Lambers, E. S. ; Pearton, S. J. ; Ostling, M. ; Zetterling, C-M. ; Grow, J. M. ; Ren, F. ; Shul, R. J. ; Han, J.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.507-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
4.

Conference Proceedings
Conference Proceedings
4. Dry and Wet Etch Processes for NiMnSb, LaCaMnO3, and Related Materials
Hong, J. ; Wang, J. J. ; Lambers, E. S. ; Caballero, J. A. ; Childress, J. R. ; Pearton, S. J. ; Dahmen, K. H. ; Molnar, S. von ; Cadieu, F. J. ; Sharifi, F.
Pub. info.: Science and technology of magnetic oxides : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A..  pp.3-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 494