1.

Conference Proceedings
Conference Proceedings
1. Inductively-Coupled Plasma Etching of NiFe and NiFeCo
Jung, K. B. ; Childress, J. R. ; Pearton, S. J. ; Jenson, M. ; Hurst, A. T., Jr. ; Johnson, D.
Pub. info.: High-density magnetic recording and integrated magneto-optics, materials and devices : symposium held April 12-16, 1998, San Francisco, California, U.S..  pp.79-,  1998.  Warrendale, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 517
2.

Conference Proceedings
Conference Proceedings
2. Parametric Study of Compound Semiconductor Etching Utilizing Inductively Coupled Plasma Source
Constantine, C. ; Johnson, D. ; Barratt, C. ; Shul, R. J. ; McClellan, G. B. ; Briggs, R. D. ; Rieger, D. J. ; Karlicek, R. F., Jr. ; Lee, J. W. ; Pearton, S. J.
Pub. info.: Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A..  pp.431-,  1996.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 421