Pearton, S. J. ; Hobson, W. S. ; Chakrabarti, U. K. ; Short, K. T. ; White, A. E. ; Jnes, K. S
Pub. info.:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.399-404, 1989. Pittsburgh, Pa.. Materials Research Society