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Conference Proceedings

1. Dry Etching of InGaP and AlInP in CH4/H2/Ar

Lee, J. W. ; Pearton, S. J. ; Santana, C. J. ; Lambers, E. S. ; Abernathy, C. R. ; Hobson, W. S. ; Ren, F.

Pub. info.:	Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.. pp.315-, 1996. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	421

Conference Proceedings

2. Properties of H, O and C in GaN

Pearton, S. J. ; Abernathy, C. R. ; Lee, J. W. ; Vartuli, C. B. ; MacKenzie, J. D. ; Ren, F. ; Wilson, R. G. ; Zavada, J. M. ; Shul, R. J. ; Zolper, J. C.

Pub. info.:	Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.. pp.347-, 1996. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	421

Conference Proceedings

3. Plasma Chemistries for Dry Etching GaN, AlN, InGaN and InAlN

Pearton, S. J. ; Vartuli, C. B. ; Lee, J. W. ; Donovan, S. M. ; MacKenzie, J. D. ; Abernathy, C. R. ; Shul, R. J. ; McLane, G. F. ; Ren, F.

Pub. info.:	Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.. pp.309-, 1996. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	421

Conference Proceedings

4. Damage Introduction in InGaP and AlGaAs by Electron Cyclotron Resonance Ar Plasmas

Lee, J. W. ; Pearton, S. J. ; Stradtmann, R. R. ; Abernathy, C. R. ; Hobson, W. S. ; Ren, F.

Pub. info.:	Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.. pp.239-, 1996. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	421

Conference Proceedings

5. Cl2-Based ECR Etching of InGaP, AlInP and AlGaP

Hong, J. ; Lee, J. W. ; Pearton, S. J. ; Santana, C. ; Abernathy, C. R. ; Hobson, W. S. ; Ren, F.

Pub. info.:	Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.. pp.303-, 1996. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	421

Conference Proceedings

6. AFM Analysis of ECR Dry-Etched InGaP, AllnP and AlGaP

Ren, F. ; Hobson, W. S. ; Lothian, J. R. ; Lopata, J. ; Caballero, J. A. ; Lee, J. W. ; Pearton, S. J. ; Cole, M. W.

Pub. info.:	Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.209-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	406

Conference Proceedings

7. Dry Etch Damage in InN, InGaN and InAlN

Pearton, S. J. ; Lee, J. W. ; MacKenzie, J. D. ; Vartuli, C. B. ; Donovan, S. M. ; Abernathy, C. R. ; Shul, R. J. ; Ren, F. ; Lothian, J. R.

Pub. info.:	III-Nitride, SiC, and Diamond Materials for Electronic Devices : symposium held April, 1996, San Francisco, California, U.S.A.. pp.163-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	423

Conference Proceedings

8. Parametric Study of Compound Semiconductor Etching Utilizing Inductively Coupled Plasma Source

Constantine, C. ; Johnson, D. ; Barratt, C. ; Shul, R. J. ; McClellan, G. B. ; Briggs, R. D. ; Rieger, D. J. ; Karlicek, R. F., Jr. ; Lee, J. W. ; Pearton, S. J.

Pub. info.:	Compound semiconductor electronics and photonics : symposium held April 8-10, 1996, San Francisco, California, U.S.A.. pp.431-, 1996. Pittsburgh, Penn. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	421

Conference Proceedings

9. Role of C. O and H in III-Nitrides

Abernathy, C. R. ; Pearton, S. J. ; Mackenzie, J. D. ; Lee, J. W. ; Vartuli, C. B. ; Wilson, R. G. ; Shul, R. J. ; Zolper, J. C. ; Zavada, J. M.

Pub. info.:	Gallium nitride and related materials : the First International Symposium on Gallium Nitride and Related Materials held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.685-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	395

10.

Conference Proceedings

10. Thermal Stability of Ohmic Contacts to n-InxGa1-xN

Durbha, A. ; Pearton, S. J. ; Abernathy, C. R. ; Lee, J. W. ; Holloway, P. H. ; Ren, F.

Pub. info.:	Gallium nitride and related materials : the First International Symposium on Gallium Nitride and Related Materials held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.825-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	395

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