1.

Conference Proceedings
Conference Proceedings
1. GROWTH AND DOPING OF AlAs BY MOMBE
Abernathy, C. R. ; Pearton, S. J. ; Wisk, P. W. ; Hobson, W. S. ; Ren, F.
Pub. info.: Compound semiconductor epitaxy : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.187-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 340
2.

Conference Proceedings
Conference Proceedings
2. EFFECTS OF ION-IRRADIATION AND HYDROGENATION ON THE DOPING OF InGaAlN ALLOYS
Pearton, S. J. ; Abernathy, C. R. ; Hobson, W. S. ; Ren, F.
Pub. info.: Physics and applications of defects in advanced semiconductors : symposium held November 29-December 1, 1993, Boston, Massachusetts, U.S.A..  pp.261-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 325
3.

Conference Proceedings
Conference Proceedings
3. ORIENTED CARBON PAIR DEFECTS STABILIZED BY HYDROGEN IN AS-GROWN GaAs EPITAXIAL LAYERS
Cheng, Y. M. ; Stavola, M. ; Abernathy, C. R. ; Pearton, S. J.
Pub. info.: Physics and applications of defects in advanced semiconductors : symposium held November 29-December 1, 1993, Boston, Massachusetts, U.S.A..  pp.273-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 325
4.

Conference Proceedings
Conference Proceedings
4. OPTICAL EMISSION END-POINT DETECTION FOR VIA HOLE ETCHING IN InP AND GaAs POWER DEVICE STRUCTURES
Pearton, S. J. ; Ren, F. ; Abernathy, C. R. ; Constantine, C.
Pub. info.: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.341-,  1994.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 324
5.

Conference Proceedings
Conference Proceedings
5. ION BEAM PROCESSING OF InGaAsP
Pearton, S. J. ; Abernathy, C. R. ; Wisk, P. W. ; Ren, F.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.319-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
6.

Conference Proceedings
Conference Proceedings
6. HIGH DENSITY MAGNETICALLY CONFINED DRY ETCHING OF METALLIZATION AND DIELECTRICS IN GaAs DEVICE TECHNOLOGY
Pearton, S. J. ; Abernathy, C. R. ; Ren, F. ; Lothian, J. R. ; Kopf, R. P. ; Katz, A.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.749-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
7.

Conference Proceedings
Conference Proceedings
7. COMPARISON OF MULTIPOLAR RESONANT-CAVITY AND MAGNETIC MIRROR MICROWAVE ECR SOURCES FOR DRY ETCHING OF III-V SEMICONDUCTORS
Pearton, S. J. ; Abernathy, C. R. ; Ren, F.
Pub. info.: Microwave processing of materials IV : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.441-,  1994.  Pittsburgh,, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 347
8.

Conference Proceedings
Conference Proceedings
8. NEW DRY-ETCH CHEMISTRIES FOR III-V SEMICONDUCTORS
Pearton, S. J. ; Chakrabarti, U. K. ; Ren, F. ; Abernathy, C. R. ; Katz, A. ; Hobson, W. S. ; Constantine, C.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.399-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
9.

Conference Proceedings
Conference Proceedings
9. THERMAL STABILITY OF Ti/Pt/Au NON-ALLOYED OHMIC CONTACTS ON InN
Ren, F. ; Abernathy, C. R. ; Pearton, S. J. ; Wisk, P. W.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.421-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337