Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia. pp.299-306, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Lee, S.-S. ; Park, S. ; Chu, P.B. ; Pu, C. ; Lin, L.Y. ; Goldstein, E.L.
Pub. info.:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.274-282, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering