1.

Conference Proceedings
Conference Proceedings
1. Nano-particle laser removal from silicon wafers
Lee, J.M. ; Cho, S.H. ; Kim, T.H. ; Park, J.-G. ; Busnaina, A.A.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.441-444,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
2.

Conference Proceedings
Conference Proceedings
2. Effects of Abrasive Morphology and Surfactant in Nano-Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Poliahing
Kang, H.-G. ; Katoh, T. ; Lee, W.-M. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.215-222,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
3.

Conference Proceedings
Conference Proceedings
3. Effect of Slurry Characteristics on Nanotopography Impact in Chemical Mechanical Polishing
Katoh, T. ; Kim, S.-J. ; Paik, U. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.190-198,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
4.

Conference Proceedings
Conference Proceedings
4. Electrochemical and Frictional Behaviors of Cu Surface in Organic Acid Based Slurries During Copper CMP
Eom, D.-H. ; Ryu, J.-S. ; Hong, Y.-K. ; Myung, J.-J. ; Kim, K.-S. ; Park, J.-G.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.44-51,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21