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Resonance Ultrasonic Diagnostics of As-Grown and Process-Induced Defects in Cz Silicon

Author(s):
Belyaev,A.
Tarasov,I.
Ostapenko,S.
Koveshnikov,S.
Kochelap,V.A.
Beyaev,A.E.
1 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4218
Pub. Year:
2000
Page(from):
660
Page(to):
669
Pages:
10
Pub. info.:
Pennington, N.J. — Bellingham, Wash.: Electrochemical Society — SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
P63600/4218
Type:
Conference Proceedings

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