1.

Conference Proceedings

Conference Proceedings
Kim, I. ; Han, S.K. ; Kiether, W. ; Lee, S.J. ; Lee, C.H. ; Luan, H.F. ; Luo, Z. ; Rying, E. ; Wicaksana, Z.Wang D. ; Zhu, W. ; Hauser, J. ; Kiingon, A. ; Kwang, D.L. ; Ma, T.P. ; Maria, J.P. ; Misra, V. ; Osburn, C.M.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.211-220,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
2.

Conference Proceedings

Conference Proceedings
Osburn, C.M. ; Han, S.K. ; Kim, I. ; Campbell, S.A. ; Garfunkel, E. ; Gustafson, T. ; Hauser, J. ; King, T.-J. ; Liu, Q. ; Ranade, P. ; Kingon, A. ; Kwong, D.-L. ; Lee, S.J. ; Lee, C.H. ; Lee, J. ; Onishi, K. ; Kang, C.S. ; Choi, R. ; Cho, H. ; Nich, R. ; Lucovsky, G. ; Hong, J.G. ; Ma, T.P. ; Zhu, W. ; Luo, Z. ; Maria, J.P. ; Wicaksana, D. ; Misra, V. ; Lee, J.J. ; Suh, Y.S. ; Parksons, G. ; Niu, D. ; Stemmer, S.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.375-390,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
3.

Conference Proceedings

Conference Proceedings
Han, S.K ; Kim, I. ; Zhong, H ; Heuss, G.P. ; Lee, J.H ; Wicairsana, D. ; Maria, J.P. ; Misra, V. ; Osburn, C.M.
Pub. info.: Plasma processing XIV : proceedings of the international symposium.  pp.199-209,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-17
4.

Conference Proceedings

Conference Proceedings
Kim, I. ; Finn, S.K. ; Osburn, C.M.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.145-152,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11