1.

Conference Proceedings
Conference Proceedings
1. Surface Morphology of Ultrathin Oxide Formed on Si(100)
Hattori, T. ; Fujimura, M. ; Nohira, H.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.163-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
2.

Conference Proceedings
Conference Proceedings
2. INITIAL STAGE OF SiO2/Si INTERFACE FORMATION ON HYDROGEN-TERMINATED SILICON SURFACES
Hattori, T. ; Nohira, H. ; Ohishi, K. ; Shimizu, Y. ; Tamura, Y.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.387-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315