ECLIM 2000 : 26th European Conference on Laser Interaction with Matter, 12-16 June, 2000, Prague, Czech Republic. pp.280-283, 2000. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Fujioka, S. ; Nishimura, H. ; Ando, T. ; Ueda, N ; Namba, S. ; Aota, T. ; Murakami, M. ; Nishihara,K. ; Kang,Y. G. ; Sunahara, A. ; Furukawa,H. ; Hashimoto,K. ; Yamaura, M. ; Yasuda, Y. ; Nagai, K. ; Norimatsu, T. ; Miyanaga, N. ; Izawa, Y. ; Mima, K.
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Emerging Lithographic Technologies X. pp.61513V-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering