1.

Conference Proceedings

Conference Proceedings
K. Murata ; K. Washio ; N. Miyatake ; Y. Mori ; H. Tachibana
Pub. info.: Atomic layer deposition applications 3.  pp.31-38,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(7)
2.

Conference Proceedings

Conference Proceedings
K. Murata ; N. Miyatake ; Y. Mori ; H. Tachibana ; Y. Uraoka
Pub. info.: Thin Film Transistor Technology 8.  pp.101-106,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(8)