1.

Conference Proceedings
Conference Proceedings
1. MODELLING OF GAS-PHASE AND SURFACE KINETICS IN MOVPE OF GaAs AND AlXGa1-XAs
Mountziaris, T.J. ; Ingle, N.K. ; Kalyanasundaram, S.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.219-224,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
2.

Conference Proceedings
Conference Proceedings
2. Optimal Design of Gas Inlets for Stagnation Flow MOVPE Reactors
Gupta, V. ; Theodoropoulos, C. ; Peck, J.D. ; Mountziaris, T.J.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.300-307,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
3.

Conference Proceedings
Conference Proceedings
3. REACTION AND TRANSPORT MODELS OF THE MOVPE OF TERNARY III-V SEMICONDUCTORS
Ingle, N.K. ; Mountziaris, T.J.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.99-104,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
4.

Conference Proceedings
Conference Proceedings
4. GAS-PHASE DECOMPOSITION KINETICS OF MOVPE PRECURSORS IN A COUNTERFLOW JET REACTOR
Safvi, S.A. ; Mountziaris, T.J.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.157-164,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282