1.

Conference Proceedings
Conference Proceedings
1. Femtosecond laser ablation of Cr-SiO2 binary mask
Okamoto, T. ; Morishige, Y. ; Ohmura, E. ; Sano, T. ; Miyamoto, I.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.510-514,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
2.

Conference Proceedings
Conference Proceedings
2. Picosecond laser system for photomask repair with nanometer accuracy
Togawa, T. ; Ueda, A. ; Morishige, Y. ; Suzuki, Y.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.346-351,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830