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15 results

Conference Proceedings

1. ION BEAM SYNTHESIS OF BURIED CoSi2 LAYERS IN SiGe ALLOYS

Jebasinski, R. ; Mantl, S. ; Dieker, Chr. ; Dederichs, H. ; Vescan, L. ; Butz, R.

Pub. info.:	Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.875-880, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	279

Conference Proceedings

2. ALLOTAXY: A NEW METHOD FOR EPITAXIAL GROWTH OF COMPOUND THIN FILMS

Mantl, S. ; Bay. H. L. ; Dieker, Ch.

Pub. info.:	Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.. pp.221-226, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	263

Conference Proceedings

3. INTERDIFFUSION OFMBE-GROWN SYMMETRICALLY AND ASYMMETRICALLY STRAINED Si/Si1-XGeX SUPERLLATICES INVESTIGATED BY ION SCATTERING

Hollander, B. ; Butz, R. ; Mantl, S.

Pub. info.:	Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.. pp.255-260, 1992. Pittsburgh, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	263

Conference Proceedings

4. Quantum Transport in Ion-Beam-Synthesized Cobalt Disilicide Wires

Lenssen, D. ; Mesters, S. ; Mantl, S.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.295-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

5. THICKNESS DEPENDENCE OF ELECTRICAL TRANSPORT IN BURIED CoSi2 FILMS FABRICATED BY ION BEAM SYNTHESIS

Radermacher, K. ; Jebasinski, R. ; Mantl, S. ; Monroe, D. ; White, A. E. ; Short, K. T.

Pub. info.:	Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.209-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	320

Conference Proceedings

6. ELECTRICAL AND OPTICAL PROPERTIES OF FeSi2 LAYERS

Radermacher, K. ; Skeide, O. ; Carius, R. ; Klomfass, J. ; Mantl, S.

Pub. info.:	Silicides, germanides, and their interfaces : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.115-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	320

Conference Proceedings

7. Effect of the Oxidation of a Silicide Layer on Dopant Diffusion in the Underlying Silicon

Kappius, L. ; Tyagi, A. K. ; Breuer, U. ; Bay, H. L. ; Mantl, S.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.225-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	568

Conference Proceedings

8. Growth, Patterning and Microelectronic Applications of Epitaxial CobaltDisilicide

Mantl, S. ; Kappius, L. ; Antons, A. ; Loken, M. ; Klinkhammer, F. ; Dolle, M. ; Zhao, Q. T. ; Mesters, S. ; Buchal, Ch. ; Bay, H. L. ; Kabius, B. ; Trinkaus, H. ; Heinig, K. H.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.145-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

9. Nanopatterning of Thin CobaltDisilicide Layers by Local Oxidation

Klinkhammer, F. ; Kappius, L. ; Antons, A. ; Dolle, M. ; Trinkaus, H. ; Mesters, St. ; Bochem, H-P. ; Mantl, S. ; Heinig, K-H.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.163-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

10.

Conference Proceedings

10. Ion-Scattering Studies of Defects in GaN Thin Films on c-Oriented Sapphire

Hollander, B. ; Mantl, S. ; Mayer, M. ; Kirchner, C. ; Pelzmann, A. ; Kamp, M. ; Christiansen, S. ; Albrecht, M. ; Strunk, H. P.

Pub. info.:	Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.543-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	512

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