1.

Conference Proceedings
Conference Proceedings
1. W-coating for MEMS
Mani,S.S. ; Fleming,J.G. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.150-157,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings
Conference Proceedings
2. SiC Epitaxial Layer Growth in a Novel Multi-Wafer VPE Reactor
,A.A.Burk,Jr. ; O'Loughlin,M.J. ; Mani,S.S.
Pub. info.: Silicon carbide, III-nitrides and related materials, ICSCIII-N'97 : proceedings of the International Conference on Silicon Carbide, III-Nitrides and Related Materials, Stockholm, Sweden, September 1997.  Part1  pp.83-88,  1998.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 264-268