1.

Conference Proceedings

Conference Proceedings
Jay Mody ; Pierre Eyben ; Wouter Polspoel ; Malgorzata Jurczak ; Wilfried Vandervorst
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.49-56,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070
2.

Conference Proceedings

Conference Proceedings
Mark J. H. van Dal ; Ray Duffy ; Bartek J. Pawlak ; Nadine Collaert ; Malgorzata Jurczak ; Robert J. P. Lander
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.67-78,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070