Jay Mody ; Pierre Eyben ; Wouter Polspoel ; Malgorzata Jurczak ; Wilfried Vandervorst
Pub. info.:
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.. pp.49-56, 2008. Warrendale, Pa.. Materials Research Society
Mark J. H. van Dal ; Ray Duffy ; Bartek J. Pawlak ; Nadine Collaert ; Malgorzata Jurczak ; Robert J. P. Lander
Pub. info.:
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.. pp.67-78, 2008. Warrendale, Pa.. Materials Research Society