1.

Conference Proceedings
Conference Proceedings
1. Micropump based on temperature dependence of liquid viscosity
Masumoto,S. ; Klein,A. ; Schroth,A. ; Maeda,R.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.364-371,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
2.

Conference Proceedings
Conference Proceedings
2. Characterization and application of jet-printed thin PZT layers for actuation of MEMS
Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.380-387,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
3.

Conference Proceedings
Conference Proceedings
3. Deposition of PZT thin films by pulsed laser ablation for MEMS application
Maeda,R. ; Kikuchi,K.M. ; Schroth,A. ; Umezawa,A. ; Masumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.372-379,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242
4.

Conference Proceedings
Conference Proceedings
4. Microfabrication technique for thick structure of metals and PZT
Shimizu,T. ; Murakoshi,Y. ; Wang,Z. ; Maeda,R. ; Sano,T.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.472-477,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
5.

Conference Proceedings
Conference Proceedings
5. Preparation and characterization of sol-gel-derived PZT thin films for microactuators
Wang,Z. ; Maeda,R. ; Kikuchi,K.M.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.948-955,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
6.

Conference Proceedings
Conference Proceedings
6. Two-dimensional microscanner actuated by PZT thin film
Lin,W.-M. ; Schroth,A. ; Matsumoto,S. ; Lee,C. ; Maeda,R.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.133-140,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
7.

Conference Proceedings
Conference Proceedings
7. Si/Si Interface Bonded at Room Temperature by Ar Beam Surface Activation
Takagi,H. ; Maeda,R. ; Hosoda,N. ; Suga,T.
Pub. info.: Intergranular and interphase boundaries in materials : iib98 : proceedings of the 9th International Conference on Intergranular and Interphase Boundaries in Materials (iib98), held in Prague, Czech Republic, July, 1998.  pp.341-344,  1999.  Zurich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 294-296
8.

Conference Proceedings
Conference Proceedings
8. Transient measurement of surface deflection for beams and membranes in micromechanical devices
Klein,A. ; Schroth,A. ; Gerlach,G. ; Maeda,R.
Pub. info.: Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 16-19 June, 1998, Ancona, Italy.  pp.618-623,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3411
9.

Conference Proceedings
Conference Proceedings
9. Application of jet-printed PZT layers for actuation of small beams,membranes,and a 2D scanning actuator
Schroth,A. ; Ichiki,M. ; Maeda,R. ; Akedo,J. ; Matsumoto,S.
Pub. info.: Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia.  pp.172-180,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3242