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Low-energy focused ion-beam system for direct deposition

Author(s):
Publication title:
Electron-beam sources and charged-particle optics : 10-14 July 1995, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2522
Pub. Year:
1996
Page(from):
396
Page(to):
405
Pages:
10
Pub. info.:
Bellingham, WA: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819418814 [0819418811]
Language:
English
Call no.:
P63600/2522
Type:
Conference Proceedings

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