H. Mohri ; M. Takahashi ; K. Mikami ; H. Miyashita ; N. Hayashi
Pub. info.:
14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California. pp.288-298, 1994. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
J. Hirose ; M. Sasaki ; T. Oshima ; O. Morizuki ; M. Takahashi
Pub. info.:
Proceedings of lasers in surgery : advanced characterization, therapeutics, and systems V : 4-6 February 1995, San Jose, California. pp.456-458, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
M. Takahashi ; S. Takechi ; Y. Kaimoto ; I. Hanyu ; N. Abe
Pub. info.:
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California. pp.422-432, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering