1.

Conference Proceedings

Conference Proceedings
Economou, D. ; Lymberopoulos, D.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.1-12,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings

Conference Proceedings
Lymberopoulos, D. ; Wise, R. ; Economou, D.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.588-595,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2