1.

Conference Proceedings
Conference Proceedings
1. Combination of OPC and AttPSM for patterning sub-0.18-ｦﾌm logic devices
Kuo,H.J. ; Lin,C.H. ; Tzu,S.D. ; Yen,A.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.435-445,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Contacts to GaAs,InP,and GaP for high-temperature and high-power applications
Lee,P.P. ; Hwu,R.J. ; Sadwick,L.P. ; Kumar,B.R. ; Chern,J.-H. ; Lin,C.H. ; Balasubramaniam,H.
Pub. info.: Terahertz and gigahertz photonics : 19-23 July 1999, Denver, Colorado.  pp.217-222,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3795