1.

Conference Proceedings
Conference Proceedings
1. Quantitative Optimization of the Dopant Concentration Range in BPSG Films for ULSI Circuit Technology
Vassilliev, V.Y. ; Zheng, J.Z. ; Lin, C.
Pub. info.: Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability.  pp.244-255,  1998.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-6
2.

Conference Proceedings
Conference Proceedings
2. Dual-layer inorganic SiON bottom ARC for 0.25-μm DUV hard mask applications
Lin, Q. Y. ; Cheng, A. ; Sudijono, J. L. ; Lin, C.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.186-197,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
3.

Conference Proceedings
Conference Proceedings
3. KASIMIR initiative and recent results
Lin, C. -C. ; De Maagt, P. J. I. ; Narhi, T. ; Piironen, P. ; Mees, J. ; Weber, T. ; Mosig, J. ; Otero, P. ; Hansen, V. ; Vaupel, T. ; Hartnagel, H. L. ; Lin, C. ; Simon, A. ; Mottonen, V. ; Raisanen, A. ; Kollberg, E. L. ; Merkel, H. F. ; Zimmermann, P.
Pub. info.: Terahertz spectroscopy and applications II.  pp.417-425,  1999.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3828
4.

Conference Proceedings
Conference Proceedings
4. Mathematical Modeling of Sol-Gel Derived Carbon Xerogels as Double Layer Capacitors.
Srinivasan, V. ; Lin, C. ; Ritter, J.A. ; Weidner, J.W.
Pub. info.: Proceedings of the Symposium on Electrochemical Capacitors II.  pp.153-166,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-25
5.

Conference Proceedings
Conference Proceedings
5. Comparisons of Polisher Designs on the Performance of STI Planarization
Goh, K ; Chen, F ; Balakumar, S. ; Higelin, G. ; See, A. ; Chan, L. ; Lin, C. ; Chern, C.
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.57-70,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
6.

Conference Proceedings
Conference Proceedings
6. Electroanalytical Detection of Glucose Using a Cyanometalate Modified Electrode: Requirements for Oxidation of Buried Redox Sites in Glucose Oxidase
Du, G. ; Lin, C. ; Bocarsly, A.B.
Pub. info.: Proceedings of the fifth International Symposium on Redox Mechanisms and Interfacial Properties of Molecules of Biological Importance 1993.  pp.197-204,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-11
7.

Conference Proceedings
Conference Proceedings
7. AN ARRAY ELECTRODE TECHNIQUE FOR MAPPING CORROSION POTENTIAL AT THE POLYMERIMETAL INTERFACE
Lin, C. ; Zhuo, X. ; Nguyen, T.
Pub. info.: Corrosion and reliability of electronic materials and devices : proceedings of the fourth international symposium.  pp.282-287,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-29
8.

Conference Proceedings
Conference Proceedings
8. Gettering of Cu to voids induced by H+ implantation in SIMOX substrate
Zhang, M. ; Lin, C. ; Hemment, P.L.F. ; Gutjahr, K. ; Goesele, U.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.86-91,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
9.

Conference Proceedings
Conference Proceedings
9. Stability and Oxidation Behavior of Ir Thin Film Electrodes on Si and SiO2
Saenger, K. L. ; Grill, A. ; Shaw, T. M. ; Neumayer, D. A. ; Lin, C. ; Wang, Y. Y.
Pub. info.: Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A..  pp.119-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 541
10.

Conference Proceedings
Conference Proceedings
10. Growth of SiC thin films on (100) and (111) silicon by pulsed laser deposition combined with a vacuum anealing process
Huang, J. ; Wang, L. ; Wen, J. ; Wang, Y. ; Lin, C. ; Zetterling, C-M. ; Ostling, M.
Pub. info.: Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.207-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 572