Lim, G. ; Kim, T.E. ; Lee, J.-H. ; Kim, I. ; Lee, H-W.
Pub. info.:
Thin film materials, processes, and reliability, plasma processing for the 100 nm node and copper interconnects with low-k inter-level dielectric films : proceedings of the international symposium. pp.266-271, 2003. Pennington, N.J.. Electrochemical Society
Lim, G. ; Lee, J.H. ; Kim, J.S. ; Lee, H.W. ; Hyun, S.H.
Pub. info.:
Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.1105-1108, 2004. Zuerich. Trans Tech Publications
Lee, S.-J. ; Kong, H.-W. ; Kim, Y. ; Lee, G.-W. ; Lim, G. ; Cho, D.-W.
Pub. info.:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.200-208, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Conference Proceedings
