1.

Conference Proceedings
Conference Proceedings
1. *SCIENCE ISSUES RELATED TO WAFER CLEANING IN SILICON TECHNOLOGY
Liehr, M.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.3-18,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Studies of the Relationship Between Megasonics, Surface Etching, and Particle Removal in SC-1 Solutions
Cohen, S. L. ; Rath, D. ; Lee, G. ; Furman, B. ; Pope, K. R. ; Tsai, R. ; Syverson, W. ; Gow, C. ; Liehr, M.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.13-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386