SOFT VACUUM, PULSED ELECTRON BEAM PROCESSING OF POLYMIDES
- Author(s):
- Publication title:
- Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 101
- Pub. Year:
- 1988
- Page(from):
- 21
- Page(to):
- 26
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837692 [0931837693]
- Language:
- English
- Call no.:
- M23500/101
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
North Holland |
Materials Research Society |
8
Conference Proceedings
CHEMICAL VAPOR DEPOSITION OF SILICON INSULATING FILMS INDUCED WITH PERPENDICULAR ELECTRON BEAM
Materials Research Society |
North-Holland |
9
Conference Proceedings
Analysis of soft tissue ablation using the pulse stretched free electron laser
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Microstructure and Mechanical Property of Electron Beam Brazing and Vacuum Brazing Joints of Stainless Steel
Trans Tech Publications |
Electrochemical Society |
5
Conference Proceedings
Thermodynamic Processes and Phenomena Induced by High Current Pulsed Electron Beam
Trans Tech Publications |
North-Holland |
6
Conference Proceedings
THE ANNEALING OF PHOSPHORUS-ION-IMPLANTED COPPER INDIUM DISULFIDE BY A PULSED ELECTRON BEAM
Materials Research Society |
Materials Research Society |