1.

Conference Proceedings
Conference Proceedings
1. PARTICLE MONITORING IN ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION BPSG FILMS
Li, J. ; Moinpour, M. ; Fardi, B. ; Lee, J. ; Thach, D. ; Lawrence, M. ; Dass, A. ; Moghadam, F.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III.  pp.31-39,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-9
2.

Conference Proceedings
Conference Proceedings
2. ENHANCED ADHESION OF COPPER FILMS TO SiO2, PSG AND BPSG BY REFRACTORY METAL ADDITIONS
Rafalski, S. A. ; Spreitzer, R. L. ; Russell, S. W. ; Alford, T. L. ; Li, J. ; Moinpour, M. ; Moghadam, F. ; Mayer, J. W.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.613-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
3.

Conference Proceedings
Conference Proceedings
3. IMPLICATIONS OF SURFACE CONTAMINANTS IN A BPSG DEPOSITION AND REFLOW PROCESS
Moinpour, M. ; Leitch, R. ; Li, J. ; Thach, D. ; Moghadam, F.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.117-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
4.

Conference Proceedings
Conference Proceedings
4. TEOS/Ozone APCVD Thin SiO2 Sub 0.5 mm LDD Spacer Applications
Moinpour, M. ; Lu, W.-J. ; Sadjadi, R. ; Li, J. ; Moghadam, F. ; Wada, O. ; Watt, V.H.C.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.101-108,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5