Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.163-170, 1985. Pittsburgh, Pa.. Materials Research Society
Harrison, H B. ; Lee, Y. H. ; Poganym A. ; Kenny, M. J.
Pub. info.:
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.343-348, 1985. Pittsburgh, Pa.. Materials Research Society
Lee, Y. H. ; Harrison, H. B. ; Pogany, A. P. ; Olson, G. L
Pub. info.:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.21-26, 1987. Pittsburgh, Pa.. Materials Research Society