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Line-source e-beam crystallization of Si on silicon nitride layers

Author(s):
Knapp, J.A. ( Sandia National Laboratories )
Picraux, S.T. ( Sandia National Laboratories )
Lee, K. ( Stanford University )
Gibbons, J.F. ( Stanford University )
Sedgwick, T.O. ( IBM Research Center )
Depp, S.W. ( IBM Research Center )
1 more
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
511
Page(to):
516
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

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