1.

Conference Proceedings
Conference Proceedings
1. High Microwave Power ECR Etching of III-V Semiconductors in CH4/H2/Ar
Lee, J.W. ; Pearton, S.J. ; Lambers, E.S. ; Mileham, J.R. ; Abernathy, C.R. ; Hobson, W.S. ; Ren, F. ; Shul, R.J.
Pub. info.: Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors.  pp.203-213,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-2
2.

Conference Proceedings
Conference Proceedings
2. High Quality Thin Gate Dielectric Using ECR N2O-Plasma for Future Poly-Si TFT Applications
Lee, J.W. ; Lee, N.I. ; Han, C.H.
Pub. info.: Proceedings of the Third Symposium on Thin Film Transistor Technologies.  pp.79-88,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-23
3.

Conference Proceedings
Conference Proceedings
3. Effect of hydrogen on Ca and Mg acceptors in GaN
Lee, J.W. ; Pearton, S.J. ; Zolper, J.C. ; Stall, R.A.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.100-109,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
4.

Conference Proceedings
Conference Proceedings
4. The Role of AlN Encapsulation of GaN During Implant Activation Annealing
Zolper, J.C. ; Pearton, S.J. ; Rieger, D.J. ; Baca, A.G. ; Lee, J.W. ; Vartulli, C.R. ; Stall, R.A.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.244-248,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15
5.

Conference Proceedings
Conference Proceedings
5. Plasma-Induced-Damage of GaN
Shul, R.J. ; Zolper, J.C. ; Hagerott Crawford, M. ; Hickamn, R.J. ; Briggs, R.D. ; Pearton, S.J. ; Lee, J.W. ; Karlicek, R.F., Jr. ; Tran, C. ; Schurman, M. ; Constantine, C. ; Barratt, C.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.232-243,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15