Hahn, S. ; Tung, C. Y. ; Lee, J. ; Tuomi, T. ; Partanen, J.
Pub. info.:
Multilayers : synthesis, properties, and non-electronic applications : symposium held December 2-4, 1987, Boston, Massachusetts, U.S.A.. pp.103-108, 1988. Pittsburgh, Pa.. Materials Research Society
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.499-504, 1986. Pittsburgh, Pa.. Materials Research Society
Hahn, S. ; Tung, C. Y. ; Lee, J. ; Tuomi, T. ; Partnanen, J.
Pub. info.:
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.. pp.103-108, 1988. Pittsburgh, Pa.. Materials Research Society