Mani, S. S. ; Fleming, J. G. ; Sniegowski, J. J. ; Boer, M. P. de ; Irwin, L. W. ; Walraven, J. A. ; Tanner, D. M. ; LaVan, D. A.
Pub. info.:
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.135-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.19-, 2000. Warrendale, Pa.. MRS-Materials Research Society
LaVan, D. A. ; Hohlfelder, R. J. ; Sullivan, J. P. ; Friedmann, T. A. ; Mitchell, M. ; Ashby, C. I. H.
Pub. info.:
Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.295-, 2000. Warrendale, Pa.. MRS-Materials Research Society
LaVan, D. A. ; Hohlfelder, R. J. ; Sullivan, J. P. ; Friedmann, T. A. ; Mitchell, M. ; Ashby, C. I. H.
Pub. info.:
Amorphous and nanostructured carbon : sympoisum held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.465-, 2000. Warrendale, Pa.. MRS-Materials Research Society