Ritenour, A. ; Lee, M. ; Lu, N. ; Bai, W. ; Yu, S. ; Fitzgerald, E. ; Kwong, D.L. ; Antoniadis, D.
Pub. info.:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.406-411, 2004. Pennington, NJ. Electrochemical Society
Lee, C.H. ; Luan, H.F ; Bat, W.P. ; Lee, S.J. ; Jean, T.S. ; Roberts, D. ; Kwong, D.L.
Pub. info.:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium. pp.205-210, 2001. Pennington, NJ. Electrochemical Society
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.228-240, 2003. Pennington, N.J.. Electrochemical Society
Niwa, M. ; Harada, Y. ; Yamamoto, K. ; Hayashi, S. ; Mitsuhashi, R. ; Eriguchi, K. ; Kubota, M. ; Hoshino, Y. ; Kido, Y ; Kwong, D.L.
Pub. info.:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium. pp.99-116, 2002. Pennington, NJ. Electrochemical Society