1.

Conference Proceedings
Conference Proceedings
1. DOPANT REDISTRIBUTION DURING Pd2Si FORMATION USING RAPID THERMAL ANNEALING
Alvi, N.S. ; Kwong, D.L. ; Hopkins, C.G. ; Bauman, S.G.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.73-82,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. RAPID THERMAL ANNEALING OF ARSENIC-PHOSPHOROUS (N+-N-) DOUBLE-DIFFUSED SHALLOW JUNCTIONS
Kwong, D.L. ; Alvi, N.S. ; Ku, Y.H. ; Cheung, A.W.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.241-250,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
3.

Conference Proceedings
Conference Proceedings
3. A NOVEL SILICIDED SHALLOW JUNCTION TECHNOLOGY FOR CMOS VLSI
Kwong, D.L. ; Ku, Y.H. ; Lee, S.K. ; Alvi, N.S. ; Chu, P. ; Zhou, Y. ; White, J.M.
Pub. info.: Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.379-386,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 71