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Ellipsometry Measurement Accuracy of Gate Oxides Under Polysilicon

Author(s):
Publication title:
Micro- and nanosystems : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
782
Pub. Year:
2004
Page(from):
147
Page(to):
152
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997202 [1558997202]
Language:
English
Call no.:
M23500/782
Type:
Conference Proceedings

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